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Design of buried hinge based 3D torsional micro mirrors

Lookup NU author(s): Professor Gui Yun TianORCiD


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Publication metadata

Author(s): Tian GY; Zairi S

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Proceedings of the Sixth IEEE CPMT Conference on High Density Microsystem Design and Packaging and Component Failure Analysis (HDP)

Year of Conference: 2004

Pages: 164-170

Publisher: IEEE


DOI: 10.1109/HPD.2004.1346692

Library holdings: Search Newcastle University Library for this item

ISBN: 0780386205