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An electrostatically actuated cantilever device capable of accurately calibrating the cantilever on-chip for AFM-like applications

Lookup NU author(s): Dr Sunilkumar Rana, Dr Pedro Ortiz, Dr Alun Harris, Emeritus Professor James Burdess, Emeritus Professor Calum McNeilORCiD


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We present the principle of an electrostatically actuated cantilever device that can calibrate the cantilever stiffness on-chip with uncertainties in the range of +/-5%. The calibration procedure is quick, simple and non-destructive. The device can be fabricated using routine micromachining techniques and be easily made compatible with commercially available atomic force microscopes (AFMs). The electrostatic actuation makes the device quite versatile. In addition to the usual AFM-like applications, the device can also be used for mass-sensing applications as well as an effective interfacial force microscope.

Publication metadata

Author(s): Rana SD, Ortiz PM, Harris AJ, Burdess JS, McNeil CJ

Publication type: Article

Publication status: Published

Journal: Journal of Micromechanics and Microengineering

Year: 2009

Volume: 19

Issue: 4

ISSN (print): 0960-1317

ISSN (electronic): 1361-6439

Publisher: Institute of Physics Publishing Ltd.


DOI: 10.1088/0960-1317/19/4/045012

Notes: Article no. 045012 11 pp.


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