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Lookup NU author(s): Dr Sunilkumar Rana,
Dr Pedro Ortiz,
Dr Alun Harris,
Emeritus Professor James Burdess,
Emeritus Professor Calum McNeil
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We present the principle of an electrostatically actuated cantilever device that can calibrate the cantilever stiffness on-chip with uncertainties in the range of +/-5%. The calibration procedure is quick, simple and non-destructive. The device can be fabricated using routine micromachining techniques and be easily made compatible with commercially available atomic force microscopes (AFMs). The electrostatic actuation makes the device quite versatile. In addition to the usual AFM-like applications, the device can also be used for mass-sensing applications as well as an effective interfacial force microscope.
Author(s): Rana SD, Ortiz PM, Harris AJ, Burdess JS, McNeil CJ
Publication type: Article
Publication status: Published
Journal: Journal of Micromechanics and Microengineering
ISSN (print): 0960-1317
ISSN (electronic): 1361-6439
Publisher: Institute of Physics Publishing Ltd.
Notes: Article no. 045012
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