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Packaging of a silicon-based biochip

Lookup NU author(s): Dr Pedro Ortiz, Dr Neil Keegan, Julia Spoors, Emeritus Professor Calum McNeilORCiD


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Publication metadata

Author(s): Velten T, Biehl M, Haberer W, Koch T, Ortiz P, Keegan N, Spoors J, Hedley J, McNeil C

Editor(s): Richard C. Kullberg; Rajeshuni Ramesham

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII

Year of Conference: 2009

Pages: Article No. 720603

Publisher: SPIE - The International Society for Optical Engineering

Library holdings: Search Newcastle University Library for this item

Series Title: Proceedings of SPIE - The International Society for Optical Engineering

ISBN: 9780819474520