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MEMS Switch for Monolithic Implementation in a Miniature Reconfigurable Microwave Filter

Lookup NU author(s): Barry Dunne, Professor Leslie Kennedy, Professor Ken Snowdon


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Earlier work has shown that a high performance tunable reconfigurable notched RF filter may be fabricated using standard semiconductor fabrication techniques. Frequency tuning would be achieved by use of monolithically integrated MEMS switches to introduce or remove appropriate geometrical elements from the filter structure. Critical to the success of this concept is the performance of the MEMS switch. This paper summarises the earlier filter design and fabrication activity and describes the development and optimisation of a suitable MEMS switch that demonstrates good mechanical reliability (>106 switching cycles), low actuation voltage (~30 V), isolation of ~ -22 dB, return loss of ~ -10 dB, and insertion loss of ~ -0.8 dB (all at 20GHz).

Publication metadata

Author(s): Dunne BF, Green TG, Haynes M, Kennedy LW, Snowdon KJ

Editor(s): EMRS DTC

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: 7th EMRS DTC Technical Conference

Year of Conference: 2010

Pages: A11