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Lookup NU author(s): Dr John Hedley, Emeritus Professor James Burdess, Dr Alun Harris, Dr Barry Gallacher
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This paper investigates the technique of optical actuation of MEMS. It is shown that a device can be driven into all of its vibrational modes simply and non-destructively by a laser pulse, making this an ideal actuation methodology for device characterization at the wafer level. This actuation method is shown to be comparable to a mechanical impulse actuation.
Author(s): Hedley J, Burdess JS, Harris AJ, Gallacher BJ
Editor(s): Laudon, M., Romanowicz, B.
Publication type: Conference Proceedings (inc. Abstract)
Publication status: Published
Conference Name: Nanotechnology Conference and Trade Show (Nanotech)
Year of Conference: 2004
Pages: 394-397
Publisher: CRC Press
Library holdings: Search Newcastle University Library for this item
ISBN: 9780972842273
