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Design, fabrication and characterization of a piezoelectric MEMS diaphragm resonator mass sensor

Lookup NU author(s): Dr Zhongxu Hu, Dr John Hedley, Dr Neil Keegan, Julia Spoors, Dr Bill Waugh, Dr Barry Gallacher

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Publication metadata

Author(s): Hu Z, Hedley J, Keegan N, Spoors J, Waugh W, Gallacher B

Publication type: Article

Publication status: Published

Journal: Journal of Micromechanics and Microengineering

Year: 2013

Volume: 23

Print publication date: 11/11/2013

ISSN (print): 0960-1317

ISSN (electronic): 1361-6439

Publisher: IOP Publishing Ltd

URL: http://dx.doi.org/10.1088/0960-1317/23/12/125019

DOI: 10.1088/0960-1317/23/12/125019


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Funding

Funder referenceFunder name
EP/G061394/1EPSRC (AptaMEMS-ID)

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