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Lookup NU author(s): Dr Zhongxu Hu, Dr John Hedley, Dr Neil Keegan, Julia SpoorsORCiD, Dr Bill Waugh, Dr Barry Gallacher
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Author(s): Hu Z, Hedley J, Keegan N, Spoors J, Waugh W, Gallacher B
Publication type: Article
Publication status: Published
Journal: Journal of Micromechanics and Microengineering
Year: 2013
Volume: 23
Print publication date: 11/11/2013
ISSN (print): 0960-1317
ISSN (electronic): 1361-6439
Publisher: IOP Publishing Ltd
URL: http://dx.doi.org/10.1088/0960-1317/23/12/125019
DOI: 10.1088/0960-1317/23/12/125019
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