Toggle Main Menu Toggle Search

Open Access padlockePrints

Design, fabrication and characterization of a piezoelectric MEMS diaphragm resonator mass sensor

Lookup NU author(s): Dr Zhongxu Hu, Dr John Hedley, Dr Neil Keegan, Julia Spoors, Dr Bill Waugh, Dr Barry Gallacher


Full text for this publication is not currently held within this repository. Alternative links are provided below where available.

Publication metadata

Author(s): Hu Z, Hedley J, Keegan N, Spoors J, Waugh W, Gallacher B

Publication type: Article

Publication status: Published

Journal: Journal of Micromechanics and Microengineering

Year: 2013

Volume: 23

Print publication date: 11/11/2013

ISSN (print): 0960-1317

ISSN (electronic): 1361-6439

Publisher: IOP Publishing Ltd


DOI: 10.1088/0960-1317/23/12/125019


Altmetrics provided by Altmetric


Funder referenceFunder name
EP/G061394/1EPSRC (AptaMEMS-ID)