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A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope

Lookup NU author(s): Dr Zhongxu Hu, Dr Barry Gallacher, Emeritus Professor James Burdess, Stephen Bowles, Dr Harriet Grigg

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Author(s): ZX Hu, Gallacher BJ, Burdess J, Bowles SR, Grigg HTD

Publication type: Article

Publication status: Published

Journal: Journal of Micromechanics and Microengineering

Year: 2014

Volume: 24

Issue: 12

Print publication date: 01/12/2014

Online publication date: 30/10/2014

Acceptance date: 20/08/2014

ISSN (print): 0960-1317

ISSN (electronic): 1361-6439

Publisher: Institute of Physics Publishing Ltd.

URL: http://dx.doi.org/10.1088/0960-1317/24/12/125003

DOI: 10.1088/0960-1317/24/12/125003

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