Toggle Main Menu Toggle Search

Open Access padlockePrints

A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope

Lookup NU author(s): Dr Zhongxu Hu, Dr Barry Gallacher, Emeritus Professor James Burdess, Stephen Bowles, Dr Harriet Grigg


Full text for this publication is not currently held within this repository. Alternative links are provided below where available.

Publication metadata

Author(s): ZX Hu, Gallacher BJ, Burdess J, Bowles SR, Grigg HTD

Publication type: Article

Publication status: Published

Journal: Journal of Micromechanics and Microengineering

Year: 2014

Volume: 24

Issue: 12

Print publication date: 01/12/2014

Online publication date: 30/10/2014

Acceptance date: 20/08/2014

ISSN (print): 0960-1317

ISSN (electronic): 1361-6439

Publisher: Institute of Physics Publishing Ltd.


DOI: 10.1088/0960-1317/24/12/125003


Altmetrics provided by Altmetric