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Shear-horizontal surface acoustic wave characteristics of a (110) ZnO/SiO2/Si multilayer structure

Lookup NU author(s): Dr Chen Fu


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Shear-horizontal (SH) surface acoustic wave (SAW) propagation characteristics in IDT/(110) ZnO/SiO2/Si multilayered structure were theoretically investigated using 3-dimensions (3D) finite element analysis (FEA). X-ray diffraction result shows that the prepared ZnO films have preferred (110) orientation with its c-axis parallel to the substrate. 3D FEA results and the out of plane vibration experiment confirmed that SH-SAW was successfully excited in the multilayered structure. The phase velocities V-p, electromechanical coupling coefficients K-2, and temperature coefficient of frequency (TCF) dispersion properties of mode 0 were studied considering various thicknesses of ZnO and SiO2 thin films, which were verified by experiments. SiO2 film with a positive TCF not only compensate the negative TCF of the (110) ZnO but also enhance the K-2. A large K-2 of 3.37 and nearly zero TCF of -0.1 ppm/degrees C was achieved in SH-SAW device based on IDT/(110) ZnO(2 mu m)/SiO2(1 mu m)/Si multilayer structure, which is promising for high sensitive and temperature stable bio-sensing application. (C) 2016 Elsevier B.V. All rights reserved.

Publication metadata

Author(s): Luo JT, Quan AJ, Fu C, Li HL

Publication type: Article

Publication status: Published

Journal: Journal of Alloys and Compounds

Year: 2017

Volume: 693

Pages: 558-564

Print publication date: 05/02/2017

Online publication date: 12/09/2016

Acceptance date: 11/09/2016

ISSN (print): 0925-8388

ISSN (electronic): 1873-4669

Publisher: Elsevier


DOI: 10.1016/j.jallcom.2016.09.118


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Funder referenceFunder name
11575118National Natural Science Foundation of China
2013LYM_0078Foundation for Distinguished Young Talents in Higher Education of Guangdong
2016YFB0402705National Key Research and Development Program of China
51302173National Natural Science Foundation of China
JCYJ20140418091413493Basic Research Program of Shenzhen
S2013040015481Natural Science Foundation of Guangdong Province