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Process improvement in the microelectronic industry by state space modelling

Lookup NU author(s): Dr Kostas Triantafyllopoulos

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Author(s): Triantafyllopoulos K, Godolphin EJ, Godolphin JD

Publication type: Article

Publication status: Published

Journal: Quality and Reliability Engineering International

Year: 2005

Volume: 21

Issue: 5

Pages: 465-475

ISSN (print): 0748-8017

ISSN (electronic): 1099-1638

Publisher: John Wiley & Sons Ltd.

URL: http://dx.doi.org/10.1002/qre.734

DOI: 10.1002/qre.734

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