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Love-mode surface acoustic wave devices based on multilayers of TeO2/ZnO1120/Si(100) with high sensitivity and temperature stability

Lookup NU author(s): Sami Ramadan, Dr Chen Fu


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A multilayer structure of TeO2/interdigital transducers (IDTs)/Zno(11 (2) over bar0)/si(100) was proposed and investigated to achieve both high sensitivity and temperature-stability for bio-sensing applications. Dispersions of phase velocities, electromechanical coupling coefficients K-2, temperature coefficient of delay (TCD) and sensitivity in the multilayer structures were simulated as functions of normalized thicknesses of ZnO (h(ZnO)/lambda) and TeO2 (h(TeO2)/lambda) films. The fundamental mode of Love mode MVO- surface acoustic wave (SAW) shows a larger value of K-2 and higher sensitivity compared with those of the first mode. TeO2 film with a positive TCD not only compensates the temperature effect induced due to the negative TCD of ZnO(11 (2) over bar0)/si(100), but also enhances the sensitivity of the love mode device. The optimal normalized thickness ratios were identified to be h(TeO2)/lambda = 0.021 and h(ZnO)/lambda = 0.304, and the devices with such structures can which generate a normalized sensitivity of -1.04 x 10(-3) m(3)/kg, a TCD of 0.009 ppm/degrees C, and a K-2 value of 2.76%. (C) 2016 Elsevier B.V. All rights reserved.

Publication metadata

Author(s): Luo JT, Quan AJ, Liang GX, Zheng ZH, Ramadan S, Fu C, Li HL, Fu YQ

Publication type: Article

Publication status: Published

Journal: Ultrasonics

Year: 2017

Volume: 75

Pages: 63-70

Print publication date: 01/03/2017

Online publication date: 25/11/2016

Acceptance date: 24/11/2016

ISSN (print): 0041-624X

ISSN (electronic): 1874-9968

Publisher: Elsevier


DOI: 10.1016/j.ultras.2016.11.017


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Funder referenceFunder name
2016YFB0402705National Key Research and Development Program of China
51302173National Natural Science Foundation of China
JCYJ20140418091413493Basic Research Project of Shenzhen