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Lookup NU author(s): Zeyad Al-Shibaany,
Dr John Hedley
This work is licensed under a Creative Commons Attribution 4.0 International License (CC BY 4.0).
© 2020 by the authors. Licensee MDPI, Basel, Switzerland. This paper presents a micromachining process for lithium niobate (LiNbO3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 µm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.
Author(s): Al-Shibaany ZYA, Penchev P, Hedley J, Dimov S
Publication type: Article
Publication status: Published
Online publication date: 14/04/2020
Acceptance date: 03/04/2020
Date deposited: 26/07/2021
ISSN (print): 1424-8239
ISSN (electronic): 1424-8220
Publisher: MDPI AG
PubMed id: 32295102
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