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Laser micromachining of Lithium niobate-based resonant sensors towards medical devices applications

Lookup NU author(s): Zeyad Al-Shibaany, Dr John Hedley



This work is licensed under a Creative Commons Attribution 4.0 International License (CC BY 4.0).


© 2020 by the authors. Licensee MDPI, Basel, Switzerland. This paper presents a micromachining process for lithium niobate (LiNbO3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 µm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.

Publication metadata

Author(s): Al-Shibaany ZYA, Penchev P, Hedley J, Dimov S

Publication type: Article

Publication status: Published

Journal: Sensors

Year: 2020

Volume: 20

Issue: 8

Online publication date: 14/04/2020

Acceptance date: 03/04/2020

Date deposited: 26/07/2021

ISSN (print): 1424-8239

ISSN (electronic): 1424-8220

Publisher: MDPI AG


DOI: 10.3390/s20082206

PubMed id: 32295102


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