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First principles calculations of dopant solubility based on strain compensation and direct binding between dopants and group IV impurities

Lookup NU author(s): Dr Chihak Ahn

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Author(s): Ahn C, Diebel M, Dunham ST

Publication type: Article

Publication status: Published

Journal: Journal of Vacuum Science and Technology B

Year: 2006

Volume: 24

Issue: 2

Pages: 700-705

ISSN (print): 1071-1023

ISSN (electronic): 1520-8567

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1116/1.2179458

DOI: 10.1116/1.2179458

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