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Lookup NU author(s): Professor Jon Goss
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The alpha-gamma transition in an argon radio-frequency discharge has been measured using Langmuir probes and a current-voltage monitor. At two pressures, bi-Maxwellian electron energy distribution functions were measured in the gamma mode. Increasing the gas pressure results in a decrease in the high-energy component of the electron energy distribution function. A transition region in the current-voltage characteristic is also observed. (C) 1999 American Institute of Physics. [S0003-6951(99)04414-9].
Author(s): Goss JP; Deegan CM; Vender D; Hopkins MB
Publication type: Article
Publication status: Published
Journal: Applied Physics Letters
Print publication date: 05/04/1999
ISSN (print): 0003-6951
ISSN (electronic): 1520-8842
Publisher: American Institute of Physics
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