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Measurement of the electron energy distribution function in an argon radio-frequency discharge in the gamma mode

Lookup NU author(s): Professor Jon Goss

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Abstract

The alpha-gamma transition in an argon radio-frequency discharge has been measured using Langmuir probes and a current-voltage monitor. At two pressures, bi-Maxwellian electron energy distribution functions were measured in the gamma mode. Increasing the gas pressure results in a decrease in the high-energy component of the electron energy distribution function. A transition region in the current-voltage characteristic is also observed. (C) 1999 American Institute of Physics. [S0003-6951(99)04414-9].

Publication metadata

Author(s): Goss JP; Deegan CM; Vender D; Hopkins MB

Publication type: Article

Publication status: Published

Journal: Applied Physics Letters

Year: 1999

Volume: 74

Issue: 14

Pages: 1969-1971

Print publication date: 05/04/1999

ISSN (print): 0003-6951

ISSN (electronic): 1520-8842

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.123716

DOI: 10.1063/1.123716

Notes: Article

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