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Lookup NU author(s): Dr Jerry Hagon, Dr Michael Shaw, Dr Elizabeth Corbin, Professor Milan Jaros
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Author(s): Hagon JP, Shaw M, Corbin EA, Jaros M
Publication type: Article
Publication status: Published
Journal: Journal of Vacuum Science and Technology. Part B
Year: 1999
Volume: 17
Issue: 5
Pages: 2025-2029
Print publication date: 01/09/1999
ISSN (print): 1071-1023
ISSN (electronic): 1520-8567
Publisher: American Institute of Physics
URL: http://dx.doi.org/10.1116/1.590865
DOI: 10.1116/1.590865
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