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Lookup NU author(s): Dr Michael Shaw, Dr Elizabeth Corbin, Dr Matthew Kitchin, Dr Jerry Hagon, Professor Milan Jaros
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Author(s): Shaw MJ, Corbin EA, Kitchin MR, Hagon JP, Jaros M
Publication type: Article
Publication status: Published
Journal: Journal of Vacuum Science & Technology B
Year: 2000
Volume: 18
Issue: 4
Pages: 2088-2095
ISSN (print): 0734-211X
ISSN (electronic): 1520-8567
Publisher: American Vacuum Society
URL: http://dx.doi.org/10.1116/1.1306330
DOI: 10.1116/1.1306330
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