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The dynamics of a vibrating silicon diaphragm microgyroscope

Lookup NU author(s): Emeritus Professor James Burdess, Dr Alun Harris


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This paper describes the principal features of a microscope bulk machined from a [100] silicon wafer by chemical etching. The equations of motion of the gyroscope are derived and the factors that determine both the mechanical and electrical characteristics of the device are identified. The response to constant and harmonic rates of turn is evaluated for both tuned and untuned gyros. Gyro performance is shown to depend upon the relationship between the mistuning of the primary and secondary models and the secondary mode damping factor.

Publication metadata

Author(s): Burdess JS, Harris AJ, Wood D, Cruickshank JL

Publication type: Article

Publication status: Published

Journal: Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science

Year: 2000

Volume: 214

Issue: 11

Pages: 1379-1388

ISSN (print): 0954-4062

ISSN (electronic): 2041-2983

Publisher: Sage Publications


DOI: 10.1243/0954406001523353


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