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The structural characteristics of microengineered bridges

Lookup NU author(s): Emeritus Professor James Burdess, Dr Alun Harris

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Abstract

The paper considers the measurement of Young's modulus and internal stress in microengineered bridge structures. Values determined from the results of static tests, obtained from the measurement of compliance using a nanoindenter, are compared with values derived from natural frequency measurements obtained from dynamic testing using a laser vibrometer. Both test procedures use mathematical models 'fitted' to experimental data to estimate Young's modulus and internal stress. For the case of boron-doped silicon bridges the dynamic test method is shown to produce the superior estimates.

Publication metadata

Author(s): Burdess JS, Harris AJ, Wood D, Pitcher R

Publication type: Article

Publication status: Published

Journal: Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering

Year: 2000

Volume: 214

Issue: 2

Pages: 351-357

ISSN (print): 0954-4062

ISSN (electronic): 2041-2983

Publisher: Sage Publications

URL: http://dx.doi.org/10.1243/0954406001523010

DOI: 10.1243/0954406001523010

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