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Lookup NU author(s): Emeritus Professor James Burdess,
Dr Alun Harris
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The paper considers the measurement of Young's modulus and internal stress in microengineered bridge structures. Values determined from the results of static tests, obtained from the measurement of compliance using a nanoindenter, are compared with values derived from natural frequency measurements obtained from dynamic testing using a laser vibrometer. Both test procedures use mathematical models 'fitted' to experimental data to estimate Young's modulus and internal stress. For the case of boron-doped silicon bridges the dynamic test method is shown to produce the superior estimates.
Author(s): Burdess JS, Harris AJ, Wood D, Pitcher R
Publication type: Article
Publication status: Published
Journal: Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering
ISSN (print): 0954-4062
ISSN (electronic): 2041-2983
Publisher: Sage Publications
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