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The structural characteristics of microengineered bridges

Lookup NU author(s): Emeritus Professor James Burdess, Dr Alun Harris


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The paper considers the measurement of Young's modulus and internal stress in microengineered bridge structures. Values determined from the results of static tests, obtained from the measurement of compliance using a nanoindenter, are compared with values derived from natural frequency measurements obtained from dynamic testing using a laser vibrometer. Both test procedures use mathematical models 'fitted' to experimental data to estimate Young's modulus and internal stress. For the case of boron-doped silicon bridges the dynamic test method is shown to produce the superior estimates.

Publication metadata

Author(s): Burdess JS, Harris AJ, Wood D, Pitcher R

Publication type: Article

Publication status: Published

Journal: Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering

Year: 2000

Volume: 214

Issue: 2

Pages: 351-357

ISSN (print): 0954-4062

ISSN (electronic): 2041-2983

Publisher: Sage Publications


DOI: 10.1243/0954406001523010


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