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Lookup NU author(s): Dr John Hedley, Dr Alun Harris, Emeritus Professor James Burdess
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A workstation for the testing and modification of IMEMS, incorporating a laser vibrometer, surface profiler and a laser for ablation, is described. Initial results have demonstrated the ability to do dynamic and static testing rapidly at the wafer level. Electrostatic actuation is shown to be one feasible method of driving the devices on a wafer; other methods are being explored.
Author(s): Hedley J, Harris A, Burdess J, McNie M
Editor(s): Courtois, B., Karam, J.M., Levitan, S.P., Markus, K.W., Tay, A.O.A., Walker, J.A.
Publication type: Conference Proceedings (inc. Abstract)
Publication status: Published
Conference Name: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Year of Conference: 2001
Pages: 402-408
Publisher: SPIE
URL: http://dx.doi.org/10.1117/12.425356
DOI: 10.1117/12.425356
Library holdings: Search Newcastle University Library for this item
Series Title: Proceedings of SPIE
ISBN: 9780819441096
