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The development of a workstation for optical testing and modification of IMEMS on a wafer

Lookup NU author(s): Dr John Hedley, Dr Alun Harris, Emeritus Professor James Burdess


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A workstation for the testing and modification of IMEMS, incorporating a laser vibrometer, surface profiler and a laser for ablation, is described. Initial results have demonstrated the ability to do dynamic and static testing rapidly at the wafer level. Electrostatic actuation is shown to be one feasible method of driving the devices on a wafer; other methods are being explored.

Publication metadata

Author(s): Hedley J, Harris A, Burdess J, McNie M

Editor(s): Courtois, B., Karam, J.M., Levitan, S.P., Markus, K.W., Tay, A.O.A., Walker, J.A.

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

Year of Conference: 2001

Pages: 402-408

Publisher: SPIE


DOI: 10.1117/12.425356

Library holdings: Search Newcastle University Library for this item

Series Title: Proceedings of SPIE

ISBN: 9780819441096