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Lookup NU author(s): Emeritus Professor James Burdess,
Dr Alun Harris,
Dr John Hedley
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Raman microspectroscopy has been used to determine the volumetric micro-strain distribution in mechanically stressed silicon microstructures. Data are presented as strain images with a spatial resolution of around 0.8 μm. A useful correlation is demonstrated between finite-element analysis calculations of volumetric strain and Raman shift. The results demonstrate that silicon beam structures incorporating a 90° bend will experience a non-uniform stress distribution along the bend radius for small radii of curvature.
Author(s): Bowden M, Gardiner DJ, Wood D, Burdess J, Harris A, Hedley J
Publication type: Article
Publication status: Published
Journal: Journal of Micromechanics and Microengineering
ISSN (print): 0960-1317
ISSN (electronic): 1361-6439
Publisher: Institute of Physics Publishing Ltd
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