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A Simple non-destructive technique to detect micropipes in silicon carbide

Lookup NU author(s): Dominique Morrison, Dr Christopher Johnson

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Abstract

An initial investigation has shown that the electrolysis of water can occur preferentially at macroscopic defects, including micropipes, where a silicon carbide wafer is used as the anode. It is proposed that observing the location of the resulting streams of bubbles, nucleated at the defects, would form the basis for a simple, non-destructive qualification test of SiC wafers.

Publication metadata

Author(s): Morrison DJ; Johnson CM; Keir A; Preston IH; Hilton KP; Uren MJ

Publication type: Article

Publication status: Published

Journal: Materials Science Forum

Year: 2001

Volume: 353-356

Pages: 303-306

Print publication date: 01/01/2001

ISSN (print): 0255-5476

ISSN (electronic):

Publisher: Trans Tech Publications

URL: http://dx.doi.org/10.4028/www.scientific.net/MSF.353-356.303

DOI: 10.4028/www.scientific.net/MSF.353-356.303

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