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Lookup NU author(s): Dr John Hedley,
Emeritus Professor James Burdess,
Dr Alun Harris,
Dr Barry Gallacher
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This paper investigates the technique of optical actuation of MEMS. It is shown that a device can be driven into all of its vibrational modes simply and non-destructively by a laser pulse, making this an ideal actuation methodology for device characterization at the wafer level. This actuation method is shown to be comparable to a mechanical impulse actuation.
Author(s): Hedley J, Burdess JS, Harris AJ, Gallacher BJ
Editor(s): Laudon, M., Romanowicz, B.
Publication type: Conference Proceedings (inc. Abstract)
Publication status: Published
Conference Name: NSTI Nanotechnology Conference and Trade Show (NSTI Nanotech 2004)
Year of Conference: 2004
Number of Volumes: 3
Publisher: Nano Science and Technology Institute
Library holdings: Search Newcastle University Library for this item