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MEMS resonator tuning using focused ion beam platinum deposition

Lookup NU author(s): Dr John Hedley, Dr Alun Harris, Emeritus Professor James Burdess


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This paper presents a novel post-fabrication tuning method which changes the resonant frequency of micromechanical beam resonators using Focused Ion Beam (FIB) deposition and removal of platinum. Tuning was achieved by depositing platinum on a 13×5μm surface area at the tips of cantilever and the middle sections of bridge resonators in thicknesses ranging from 0.3 to 3.1μm. Measurements on both types of resonator structures showed a maximum frequency change of -12% for 2.4 and 3.1μm thick deposition. A decrease was observed in the quality (Q) factor due to the damping effect of the platinum material and the increased surface roughness of the resonator. After deposition, the change in resonant frequency was re-adjusted by precise milling of the deposited platinum.

Publication metadata

Author(s): Enderling S, Jiang L, Ross AWS, Bond S, Hedley J, Harris AJ, Burdess JS, Cheung R, Zorman CA, Mehregany M, Walton AJ

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: NSTI Nanotechnology Conference and Trade Show (NSTI Nanotech 2004)

Year of Conference: 2004

Number of Volumes: 3

Pages: 421-424

Publisher: Nano Science and Technology Institute

Library holdings: Search Newcastle University Library for this item

ISBN: 0972842276