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Integration of a novel electrochemical tuning scheme with MEMS surface micromachined resonators

Lookup NU author(s): Dr John Hedley, Dr Alun Harris, Emeritus Professor James Burdess


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A novel, fully functional silver (Ag) electrodeposition process has been integrated into surface micromachined polysilicon resonators for the purpose of resonant frequency tuning. Application of different DC tuning voltages between a Ag anode and inert aluminium cathodes caused frequency changes ranging from -10% to 10.7%. This process presents a promising technique for dynamic in-situ, low voltage frequency tuning to the field of RF MEMS. © 2005 IEEE.

Publication metadata

Author(s): Enderling S, Brown III CL, Balakrishnan M, Hedley J, Stevenson JTM, Bond S, Dunare CC, Harris AJ, Burdess JS, Mitkova M, Kozicki MN, Walton AJ

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Year of Conference: 2005

Pages: 159-162

ISSN: 1084-6999

Publisher: IEEE


DOI: 10.1109/MEMSYS.2005.1453891

Library holdings: Search Newcastle University Library for this item

ISBN: 0780387325