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Lookup NU author(s): Yong Li,
Professor Gui Yun TianORCiD
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A novel SOI wafer process was established for fabrication of micromirror-based magnetic sensor. The process offers stress-free micromechanical structures without the stiction problem encountered in conventional surface micromachining process. By using two-step etching, the thickness of suspension beams of a micromirror can be independently defined. The new process also made it possible to electroplate a permalloy layer on one side of a micromirror and to maintain a mirror like reflection surface on the other side. The magnetically actuated micromirrors have been characterised using a simple laser beam reflection and CCD camera recording system. Magnetic field detection sensitivity of about 1 degree of mirror deflection per 10 -4Tesla of field intensity has been achieved. © 2007 IOP Publishing Ltd.
Author(s): Cui Z, Wang X, Li Y, Tian GY
Publication type: Article
Publication status: Published
Journal: Journal of Physics: Conference Series
ISSN (print): 1742-6588
ISSN (electronic): 1742-6596
Publisher: Institute of Physics Publishing Ltd.
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