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Experimental validation results for a parametrically excited MEMS gyroscope

Lookup NU author(s): Dr Barry Gallacher, Emeritus Professor James Burdess, Professor Jeffrey Neasham


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This paper reports experimental results for a vibratory MEMS gyroscope which is parametrically excited. Actuation and sensing are performed electrostatically. The equation of motion for the primary mode of vibration of the electrostatically actuated MEMS gyroscope is shown to contain a stiffness modulating term which, when modulated at a frequency near twice a natural frequency of the gyroscope, results in parametric resonance. Frequency sweeps, centered on approximately twice the measured resonant frequency of the device, were performed at various voltages and the parametric resonance was observed electrically at half the excitation frequency. This data was used to map the 'boundary curve', demarcating the regions of stability and instability, and was compared with theoretical predictions. Ultimately, the parametric excitation will be combined with harmonic forcing in order to increase the Q-factor of the gyroscope by at least two orders of magnitude. This may enable low-cost near inertial grade MEMS gyroscopes.

Publication metadata

Author(s): Harish KM, Gallacher BJ, Burdess JS, Neasham JA

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007

Year of Conference: 2007

Pages: 449-456

Publisher: SEM

Library holdings: Search Newcastle University Library for this item

ISBN: 9781604232226