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Experimental results for a parametrically excited micro-ring resonator

Lookup NU author(s): Dr Barry Gallacher, Emeritus Professor James Burdess, Professor Jeffrey Neasham


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This paper reports experimental results for a parametrically excited micro-ring resonator. Actuation and sensing are performed electrostatically. The equation of motion for the electrostatically actuated MEMS ring resonator is shown to contain a stiffness modulating term which, when modulated at a frequency near twice a natural frequency of the resonator, results in parametric resonance. Frequency sweeps, centered on approximately twice the measured resonant frequency of the device, were performed at various voltages and the parametric resonance was observed electrically at half the excitation frequency. This data was used to map the 'boundary curve', demarcating the regions of stability and instability, and was compared with theoretical predictions. Ultimately, the parametric excitation will be combined with harmonic forcing in order to increase the Q-factor of the ring resonator by at least two orders of magnitude.

Publication metadata

Author(s): Harish KM, Gallacher BJ, Burdess JS, Neasham JA

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Technical Proceedings of the 2007 Nanotechnology Conference and Trade Show (NSTI)

Year of Conference: 2007

Pages: 25-28

Publisher: CRC Press

Library holdings: Search Newcastle University Library for this item

Series Title: Technical Proceedings of the Nanotechnology Conference & Trade Show

ISBN: 9781420063424