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Lookup NU author(s): Yong Li,
Professor Gui Yun TianORCiD
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Magnetically actuated micromirrors have been developed for high sensitivity magnetic field measurement. Computer modelling was carried out to determine the micromirror structure at low field actuation. A novel SOI wafer process was established for micromirror fabrication. The process offers stress-free micromechanical structures without the stiction problem encountered in conventional surface micromachining process. By using two-step etching, the thickness of suspension beams of a micromirror can be independently defined. The new process also made it possible to electroplate a permalloy layer on one side of a micromirror and to maintain a mirror like reflection surface on the other side. The magnetically actuated micromirrors have been characterised using a simple laser beam reflection and CCD camera recording system. The measurement results have confirmed the computer modelling. Magnetic field detection sensitivity of about 1° of mirror deflection per 10-4 T of field intensity has been achieved. © 2007 Elsevier B.V. All rights reserved.
Author(s): Cui Z, Wang X, Li Y, Tian GY
Publication type: Article
Publication status: Published
Journal: Sensors and Actuators A: Physical
ISSN (print): 0924-4247
ISSN (electronic): 1873-3069
Publisher: Elsevier SA
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