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High aspect ratio ring gyroscopes fabricated in <100> silicon on insulator (SOI) material

Lookup NU author(s): Emeritus Professor James Burdess, Dr Alun Harris


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Publication metadata

Author(s): Harris AJ; Burdess JS; McNiew ME; Young M

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: 10th International Conference on Solid-State Sensors and Actuators

Year of Conference: 1999

Pages: 7-10