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The Newcastle University research output collection, currently available on ePrints, will shortly be moving to a new open repository platform, Figshare. To prepare for the data migration we have paused adding new content to ePrints, and will resume once the new repository is launched. During this time you will continue to have access to ePrints (but no new content will appear). We will share updates here when available.

Application of CVD-W Diffusion Barrier Layers to Dual Damascene Copper Contacts

Lookup NU author(s): Dr Alton Horsfall, Professor Anthony O'Neill

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Publication metadata

Author(s): Wang K, Cuthbertson A, Horsfall AB, Yeoh JC, Herberholz R, O'Neill AG, Colledge S, Coulson HP, Watson D, Braithwaite G

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Unknown

Conference Name: VLSI Multilevel Interconnection Conference

Year of Conference: 2007


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