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Electrodeposition of microstructures using a patterned anode

Lookup NU author(s): Dr Qibai Wu, Dr Todd Green, Professor Sudipta Roy


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In this paper we report the transfer of micro-scale patterns by electrodeposition on to substrates without requiring them to be coated with a photoresist mask. This approach makes uses of a patterned tool which is placed in close proximity to the substrate in an electrochemical reactor. With an appropriate choice of electrochemical parameters, electrodeposition can be confined to regions corresponding to the exposed regions of the tool. Experiments indicate that the electrodeposition of copper features on to conductive substrates is possible using this approach. Copper lines of 100 mu m width have been successfully replicated, but with some increase in dimension due to current spreading. This effect can be minimised by reducing the inter-electrode gap and employing an electrolyte with a low conductivity. It is also demonstrated that the tool can be used to pattern multiple substrates. Crown Copyright (C) 2011 Published by Elsevier B.V. All rights reserved.

Publication metadata

Author(s): Wu QB, Green TA, Roy S

Publication type: Article

Publication status: Published

Journal: Electrochemistry Communications

Year: 2011

Volume: 13

Issue: 11

Pages: 1229-1232

Print publication date: 31/08/2011

ISSN (print): 1388-2481

ISSN (electronic): 1873-1902

Publisher: Elsevier Inc.


DOI: 10.1016/j.elecom.2011.08.037


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