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Lookup NU author(s): Dr Sanatan Chattopadhyay
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Author(s): Pey KL, Chattopadhyay S, Zhao HB, Fitzgerald EA, Antoniadis DA, Lee PS
Publication type: Article
Publication status: Published
Journal: Journal of Vacuum Science & Technology A
Year: 2002
Volume: 20
Issue: 6
Pages: 1903-1910
ISSN (print): 1553-1813
ISSN (electronic): 1944-2807
Publisher: American Institute of Physics
URL: http://dx.doi.org/10.1116/1.1507339
DOI: 10.1116/1.1507339
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