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Accurate argon cluster-ion sputter yields: Measured yields and effect of the sputter threshold in practical depth-profiling by x-ray photoelectron spectroscopy and secondary ion mass spectrometry

Lookup NU author(s): Professor Peter Cumpson, Dr Jose Portoles, Dr Anders Barlow, Dr Naoko Sano

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Publication metadata

Author(s): Cumpson PJ, Portoles JF, Barlow AJ, Sano N

Publication type: Article

Publication status: Published

Journal: Journal of Applied Physics

Year: 2013

Volume: 114

Print publication date: 30/09/2013

Date deposited: 04/10/2013

ISSN (print): 0021-8979

ISSN (electronic): 1089-7550

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.4823815

DOI: 10.1063/1.4823815


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