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Micromachining Lithium Niobate for Rapid Prototyping of Resonant Biosensors

Lookup NU author(s): Zeyad Al-Shibaany, Dr John Hedley, Dr Dehong Huo, Dr Zhongxu Hu


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Lithium niobate material is widely used in MEMS application due to its piezoelectric properties. This paper presents the micromachining process of lithium niobate to rapid prototype a resonant biosensor design. A high precision CNC machine was used to machine a sample of lithium niobate material at 5 different spindle speeds to find out the best conditions to machine this brittle material. A qualitative visual check of the surface was performed by using scanning electron microscopy, surface roughness was quantitatively investigated using an optical surface profiler and Raman spectroscopy to check the strain of the surface. Results show that the surface quality of the lithium niobate was significantly affected by the spindle speed with optimum conditions at 70k rpm giving a strained surface with 500 nm rms roughness.

Publication metadata

Author(s): Al-Shibaany ZYA, Hedley J, Huo DH, Hu ZX

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: 27th International Conference on CADCAM, Robotics and Factories of the Future 2014 (CARs & FoF)

Year of Conference: 2014

Online publication date: 22/07/2014

Acceptance date: 15/05/2014

Date deposited: 13/02/2015

ISSN: 1757-8981

Publisher: Institute of Physics Publishing Ltd.


DOI: 10.1088/1757-899X/65/1/012030

Library holdings: Search Newcastle University Library for this item

Series Title: IOP Conference Series: Materials Science and Engineering

ISBN: 1757899X