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Lookup NU author(s): Dr Dehong Huo
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A fully flexure micro/nano transmission platform (MNTP) which has five degrees of freedom is designed on the basis of bridge type amplification mechanism. According to the kinematic theory and the elastic beam theory, the theoretical output displacement equation of the platform is derived, and then piezoelectric actuator (PZT) is calibrated. Meanwhile, a full closed-loop control strategy of the platform is established using the feedforward proportional-integral-derivative (PID) compound control algorithm based on the Preisach model. Moreover, the total transfer function of the micro positioning system is derived, and the calculation method of output signal is acquired. Finally, the theoretical output displacement is verified by finite element analysis (FEA) and positioning experiments. ©, 2014, Nanjing University of Aeronautics an Astronautics. All right reserved.
Author(s): Lin C, Ji J, Tao Y, Huo D, Cai L, Cheng K
Publication type: Article
Publication status: Published
Journal: Transactions of Nanjing University of Aeronautics and Astronautics
Print publication date: 01/10/2014
Acceptance date: 02/06/2014
ISSN (print): 1005-1120
Publisher: Nanjing University of Aeronautics an Astronautics