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Lookup NU author(s): Dr Dehong Huo, Dr Zi Jie Choong, Yilun Shi, Dr John Hedley, Yuanyi Zhao
This work is licensed under a Creative Commons Attribution 4.0 International License (CC BY 4.0).
Lithium niobate (LiNbO3) is a crystalline material which is widely applied in surface acoustic wave, MEMS, and optical devices, owing to its superior physical, optical, and electronic properties. Due to its low toughness and chemical inactivity, LiNbO3 is considered as a hard-to-machine material and has been traditionally left as inert substrate upon which other micro structures are deposited. However, in order to make use of its superior material properties and increase the device efficiency, fabrication of microstructures on LiNbO3 directly is highly demanded. This paper presents an experimental investigation on the micro machinability of LiNbO3 via micro milling with the aim to obtain optimal process parameters. Machining of micro slots was performed on Z-cut LiNbO3 wafers using single crystal diamond tools. Surface and edge quality, cutting forces, and crystallographic effect were examined and characterized. Ductile mode machining of LiNbO3 was found to be feasible at low feedrate and small depth of cut. Strong crystallographic effect on the machined surface quality was also observed. Finally, some LiNbO3 micro components applicable to sensing applications were fabricated.
Author(s): Huo D, Choong Z, Shi Y, Hedley J, Zhao Y
Publication type: Article
Publication status: Published
Journal: Journal of Micromechanics and Microengineering
Year: 2016
Volume: 26
Issue: 9
Online publication date: 01/07/2016
Acceptance date: 05/05/2016
Date deposited: 05/05/2016
ISSN (print): 0960-1317
ISSN (electronic): 1361-6439
Publisher: Institute of Physics Publishing Ltd
URL: http://dx.doi.org/10.1088/0960-1317/26/9/095005
DOI: 10.1088/0960-1317/26/9/095005
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