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Investigation of micro milling of lithium niobate for biosensor applications

Lookup NU author(s): Yilun Shi, Dr Dehong Huo, Dr Yan Zhao, Zeyad Al-Shibaany, Dr John Hedley


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Lithium niobate (LiNbO<inf>3</inf>) is a crystalline material which is widely applied in surface acoustic wave, MEMS, and optical devices, owing to its superior physical, optical, and electronic properties. Due to its brittle property, LiNbO<inf>3</inf> was considered as a hard-to-machine material. In this paper, we focused on applying the brittle-ductile transition phenomenon to accomplish machining LiNbO<inf>3</inf> in ductile regime, with the aim to obtain optimal process parameters. Machining of micro channels was performed on Z-cut LiNbO<inf>3</inf> wafers, by micro end milling, using both single crystal diamond and TiAlN coated tools. The cutting forces, surface quality and tool wear conditions were examined and characterised for analysis. In addition, the effect of the material's crystallographic structure over the machined surface quality is also studied. Finally, high quality crack-free surfaces were obtained under carefully selected cutting parameter sets.

Publication metadata

Author(s): Shi Y, Huo D, Zhao Y, Al-Shibaany ZYA, Hedley J

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015

Year of Conference: 2015

Pages: 301-302

Acceptance date: 01/01/1900

Publisher: euspen


Library holdings: Search Newcastle University Library for this item

ISBN: 9780956679079