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Properties of AlN Layers Grown on SiC Substrates in Wide Temperature Range by HVPE

Lookup NU author(s): Irina Nikitina


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Publication metadata

Author(s): Nikitina IP; Yu Ledyaev O; Cherenkov AE; Nikolaev AE; Kuznetsov NI; Dunaevski MS; Titkov AN; Dmitriev VA

Publication type: Article

Publication status: Published

Journal: Physica Status Solidi. C: Conferences and Critical Reviews

Year: 2002

Volume: 0

Issue: 1

Pages: 474–478

ISSN (print): 1862-6351

ISSN (electronic): 1610-1642

Publisher: Wiley - V C H Verlag GmbH & Co. KGaA


DOI: 10.1002/pssc.200390091


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