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Chemical vapor deposition of 4H-SiC epitaxial layers on porous SiC substrates

Lookup NU author(s): Irina Nikitina

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Author(s): Nikitina I; Mynbaeva M; Saddow SE; Melnychuk G; Scheglov M; Sitnikova A; Kuznetsov N; Mynbaev K; Dmitriev V

Publication type: Article

Publication status: Published

Journal: Applied Physics Letters

Year: 2001

Volume: 78

Issue: 1

Pages: 117-119

ISSN (print): 0003-6951

ISSN (electronic): 1077-3118

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.1337628

DOI: 10.1063/1.1337628

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