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Observing the evolution of regular nanostructured indium phosphide after gas cluster ion beam etching

Lookup NU author(s): Dr Anders Barlow, Dr Naoko Sano, Dr Billy Murdoch, Dr Jose Portoles, Professor Peter Cumpson


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© 2018 Elsevier B.V. Indium phosphide (InP) surfaces develop a pronounced nanostructured texture upon irradiation by energetic ion beams. We have observed the mechanism of nanostructure evolution of InP under irradiation by an Ar gas cluster ion beam (GCIB) using helium ion microscopy (HIM). Initially, metallic indium nanoparticles form on the surface after removal of the top-most oxide layer. These nanoparticles form a mask which shadows the underlying InP. As the ion dose is increased, the masking effect results in substantial nanostructured topography in the form of pillars or nanocones, oriented along the axis of the incident GCIB. The surface sensitivity and high resolution of the HIM facilitates the direct observation of the metallic indium cap at the top of the pillars.

Publication metadata

Author(s): Barlow AJ, Sano N, Murdoch BJ, Portoles JF, Pigram PJ, Cumpson PJ

Publication type: Article

Publication status: Published

Journal: Applied Surface Science

Year: 2018

Volume: 459

Pages: 678-685

Print publication date: 30/11/2018

Online publication date: 30/07/2018

Acceptance date: 28/07/2018

ISSN (print): 0169-4332

ISSN (electronic): 1873-5584

Publisher: Elsevier BV


DOI: 10.1016/j.apsusc.2018.07.195


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