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A novel long-stroke fast tool servo system with counterbalance and its application to the ultra-precision machining of microstructured surfaces

Lookup NU author(s): Dr Zheng Gong, Dr Dehong Huo



This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License (CC BY-NC-ND).


This paper presents a novel long-stroke fast tool servo (FTS) system with counterbalance and its application to the diamond machining of microstructured surfaces. The FTS system is driven by a voice coil motor and guided by air bearings. A hybrid control algorithm which combines PID control, sliding mode control and feed-forward control was specifically designed for the system and ensures that it has less than 1% tracking error and achieves ± 1mm stroke and 105 Hz bandwidth. The counterbalance is achieved by the symmetric arrangement of two of the same FTS systems. System vibration decreased significantly from ± 3 μm to ± 0.145 μm when the counterbalance was working. Machining experiments were conducted using the FTS system on a diamond turning machine. A microstructured surface simulation model was built and information about the workpiece surface tested and collected. When the counterbalance was working, error in the machine axes decreased from micron-level to nano-level and the surface roughness of the microstructured surface was also reduced. The system achieves ± 1 mm (± 0.5 mm) stroke at 30 Hz (40 Hz) with 0.35% (0.68%) tracking error during machining processes, and the depth error of the machined microstructured surface was measured at 1.4% (2.3%).

Publication metadata

Author(s): Gong Z, Huo D, Niu Z, Chen W, Cheng K

Publication type: Article

Publication status: Published

Journal: Mechanical Systems and Signal Processing

Year: 2022

Volume: 173

Print publication date: 01/07/2022

Online publication date: 26/03/2022

Acceptance date: 17/03/2022

Date deposited: 17/03/2022

ISSN (print): 0888-3270

ISSN (electronic): 1096-1216

Publisher: Academic Press


DOI: 10.1016/j.ymssp.2022.109063

ePrints DOI: 10.57711/nfn0-2j66


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