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Effect of oxygen on the diffusion of nitrogen implanted in silicon

Lookup NU author(s): Professor Nick Cowern


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Publication metadata

Author(s): Mannino G, Privitera V, Scalese S, Libertino S, Napolitani E, Pichler P, Cowern NEB

Publication type: Article

Publication status: Published

Journal: Electrochemical and Solid-State Letters

Year: 2004

Volume: 7

Issue: 8

Pages: G161-G163

ISSN (print): 1099-0062

ISSN (electronic): 1944-8775

Publisher: Electrochemical Society, Inc.


DOI: 10.1149/1.1759295


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