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A physically based model for the spatial and temporal evolution of self-interstitial agglomerates in ion-implanted silicon

Lookup NU author(s): Professor Nick Cowern

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Author(s): Ortiz CJ, Pichler P, Fuhner T, Cristiano F, Colombeau B, Cowern NEB, Claverie A

Publication type: Article

Publication status: Published

Journal: Journal of Applied Physics

Year: 2005

Volume: 96

Issue: 9

Pages: 4866-4877

ISSN (print): 0021-8979

ISSN (electronic): 1089-7550

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.1786678

DOI: 10.1063/1.1786678

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