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Transient enhanced diffusion and deactivation of ion-implanted As in strained Si

Lookup NU author(s): Dr Gabriela Dilliway, Professor Nick Cowern

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Author(s): Dilliway GDM, Smith AJ, Hamilton JJ, Benson J, Colombeau B, Jones R, Lu Xu, McNally PJ, Cooke G, Kheyrandish H, Cowern NEB

Publication type: Article

Publication status: Published

Journal: Nuclear Instruments and Methods in Physics Research B

Year: 2005

Volume: 237

Issue: 1-2

Pages: 131-135

ISSN (print): 0168-583X

ISSN (electronic): 1872-9584

Publisher: Elsevier BV

URL: http://dx.doi.org/10.1016/j.nimb.2005.04.114

DOI: 10.1016/j.nimb.2005.04.114

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