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Modeling of extrinsic extended defect evolution in ion-implanted silicon upon thermal annealing

Lookup NU author(s): Professor Nick Cowern

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Publication metadata

Author(s): Ortiz CJ, Cristiano F, Colombeau B, Claverie A, Cowern NEB

Publication type: Article

Publication status: Published

Journal: Materials Science and Engineering B: Advanced Functional Solid-state Materials

Year: 2004

Volume: 114-115

Pages: 184-192

ISSN (print): 1873-4944

Publisher: Elsevier SA

URL: http://dx.doi.org/10.1016/j.mseb.2004.07.054

DOI: 10.1016/j.mseb.2004.07.054

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