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Cluster ripening and transient enhanced diffusion in silicon

Lookup NU author(s): Professor Nick Cowern

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Author(s): Cowern NEB; Mannino G; Stolk PA; Roozeboom F; Huizing HGA; van Berkum JGM; Cristiano F; Claverie A; Jaraiz M

Publication type: Article

Publication status: Published

Journal: Materials Science in Semiconductor Processing

Year: 1999

Volume: 2

Pages: 369-376

ISSN (print): 1369-8001

ISSN (electronic): 1873-4081

Publisher: Elsevier Science Ltd

URL: http://dx.doi.org/10.1016/S1369-8001(99)00039-6

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