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Enhanced diffusion in silicon processing

Lookup NU author(s): Professor Nick Cowern

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Publication metadata

Author(s): Cowern NEB; Rafferty CS

Publication type: Article

Publication status: Published

Journal: MRS Bulletin

Year: 2000

Volume: 25

Pages: 39-44

ISSN (print): 0883-7694

ISSN (electronic): 1938-1425

Publisher: Cambridge University Press

URL: http://dx.doi.org/10.1557/mrs2000.97

DOI: 10.1557/mrs2000.97

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