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Properties of ultrathin oxynitride films grown on Si0.74Ge0.26/Si heterolayers using low energy plasma source nitrogen implantation

Lookup NU author(s): Dr Rajat Mahapatra

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Publication metadata

Author(s): Mahapatra R, Maikap S, Kar GS, Ray SK

Publication type: Article

Publication status: Published

Journal: Solid-State Electronics

Year: 2005

Volume: 49

Issue: 3

Pages: 449–452

ISSN (print): 0038-1101

ISSN (electronic): 1879-2405

Publisher: Pergamon

URL: http://dx.doi.org/10.1016/j.sse.2004.11.010

DOI: 10.1016/j.sse.2004.11.010

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