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Suppression of phosphorus diffusion by carbon co-doping

Lookup NU author(s): Professor Nick Cowern


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Publication metadata

Author(s): Pawlak BJ, Duffy R, Janssens T, Vandervorst W, Collart EJH, Felch S, Cowern NEB

Publication type: Article

Publication status: Published

Journal: Applied Physics Letters

Year: 2006

Volume: 89

Issue: 6

ISSN (print): 0003-6951

ISSN (electronic): 1077-3118

Publisher: American Institute of Physics


DOI: 10.1063/1.2234315


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