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Vacancy-engineering implants for high boron activation in silicon-on-insulator material

Lookup NU author(s): Professor Nick Cowern

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Author(s): Smith AJ, Cowern NEB, Gwilliam R, Sealy BJ, Colombeau B, Collart EJH, Gennaro S, Giubertoni D, Bersani M, Barozzi M

Publication type: Article

Publication status: Published

Journal: Applied Physics Letters

Year: 2006

Volume: 88

Issue: 8

ISSN (print): 0003-6951

ISSN (electronic): 1520-8842

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.2178487

DOI: 10.1063/1.2178487

Notes: Article no. 082112 3 pages

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