ePrints

Fluorine-vacancy complexes in ultrashallow B-implanted silicon

Lookup NU author(s): Professor Nick Cowern

Downloads

Full text for this publication is not currently held within this repository. Alternative links are provided below where available.

Publication metadata

Author(s): Abdulmalik DA, Coleman PG, Cowern NEB, Smith AJ, Sealy BJ, Lerch W, Paul S, Cristiano F

Publication type: Article

Publication status: Published

Journal: Applied Physics Letters

Year: 2006

Volume: 89

Issue: 5

ISSN (print): 0003-6951

ISSN (electronic): 1077-3118

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.2335594

DOI: 10.1063/1.2335594

Altmetrics

Share